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31st International
Conference on Micro- and Nano-Engineering
Vienna, Austria, 19 – 22 September 2005
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Prior to MNE 2005, the THIRD
EUROPEAN EUVL WORKSHOP will take place in Vienna on
Monday, 19 Sept 2005, 9am - 5pm, also at the Hofburg conference
center (reception
Sunday, 18 Sept 2005, evening, at the Ephesos Museum, Heldenplatz).
On-line registration for the EUVL workshop is possible (see "registration").
After
the MNE 2005, a SEMATECH – SELETE – MEDEA+
CPL WORKSHOP, focused on Charged
Particle Lithography (ML2 - Mask-Less Lithography, EPL
- Electron Projection Lithography,
EBDW - Electron Beam Direct Write) will take place in Vienna
on Friday, 23 Sept 2005, 9am - 4:30pm, at Hotel Bristol,
Kaerntner-Ring 1 (near the Vienna States Opera). Participation
is limited to 150 persons.
On-line registration for the CPL workshop is possible
(see "registration") |
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