Photon Lithography
DUV, 193nm, 193nm immersion, 157nm, 157nm immersion, EUV, sources,
optics, systems, alignment, optical proximity correction,
novel techniques, ...
Electron Beam Lithography
Sources, optics, systems, alignment, e-beam proximity correction,
e-beam mask writer, ...
Ion Beam Lithography & Technology
Sources, optics, systems, alignment, ion beam surface interactions,
gas assisted ion beam etching and deposition, ...
Nanoimprint Lithography & Technology
Systems, alignment, nanoimprint methods, results and applications,
...
Mask & Nanoimprint-Template Technology
Masks for photon-based and charged-particle lithography,
stamps for nanoimprint lithography and technology, accuracy
and line width control,
contamination and damage, inspection and repair, ...
Mask-Less Lithography
Photon, charged-particle, and proximity probe based techniques,
sources, optics, systems, alignment, modelling, throughput
Lithography Modelling & Cost-Of-Ownership
Lithography mask-to-wafer / maskless pattern exposure modelling,
design for imaging, post layout generation, mask and litho
cost-of-ownership analysis, ...
Process Diagnostics & Control
Inspection, testing, modification, metrology, in-situ measurements,
inspection and modification of devices and circuits, ...
Resists and Resist Processing
Materials, thin films, multilayer and inorganic resists,
antireflective coatings, surface imaging, conductive films,
chemical amplifications, wet and dry processing, characterization,
modelling of exposure and development, ...
Pattern Transfer
Dry etching, beam-assisted etching and deposition, etch damage,
lift-off, plating, implantation, sputtering, sources and
reactors, pattern transfer modelling, ...
Fabrication
of Micro&Nano - Systems
Surface and bulk micro-machining, 3D structures, new
materials, sensors and actuators, optical and electro-mechanical
systems, micro (opto) electro-mechanical devices - M(O)EMS,
microfluidics,
... Nanoscale Engineering & Fabrication
Novel fabrication methods, limits of miniaturization, self-assembling
and self-organizing systems, scanning probe techniques,
nanomechanics, nanofluidics, measurements / characterization
/ modelling at the nanoscale, ...
Micro & Nano-Biotechnology
Bio-MEMS, Lab-on-a-chip, bio(medical)devices, micro total-analysis
systems, micro- and nanofluidic biodevices, ...
Nano-Devices
Nanoelectronics, nanomechanical devices, nanooptics / nanophotonics,
nanomagnetics / datastorage devices, carbon nantotube devices,
molecular devices, characterization and application of
nanodevices, ...
Nanofabrication for Quantum Computing
Nanofabrication techniques for solid state quantum computing,
single ion implantation techniques, ion trap quantum computing
techniques, ..
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